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Plasma cleaner Product List

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Plasma Cleaner PC-1100

This is a batch-type plasma cleaner that is ideal for surface cleaning of plastic packages, LCD substrates, hybrid ICs, and more.

The reaction chamber can be equipped with multiple tiers of electrode shelves, allowing for the processing of a large number of substrates in various shapes, from small components to square substrates for FPD. Additionally, it is a plasma cleaner that can select from three processing modes (RIE mode, plasma mode, downstream mode), enabling optimal processing according to the type of substrate.

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Plasma Cleaner PC-300

It is a batch-type plasma cleaning device (plasma cleaner) suitable for surface modification.

This device allows you to select the processing mode from RIE mode and plasma mode, enabling optimal processing according to the type of substrate. Additionally, it is a very compact tabletop plasma cleaner designed to save space and can be used in various locations.

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Reduction Plasma Cleaner "Aqua Plasma Cleaner"

Achieving safe reduction and cleaning of metal oxide films! Plasma treatment device using water vapor.

The "Aqua Plasma Cleaner" is a plasma treatment device that primarily uses water vapor. It can safely and efficiently perform surface treatments such as the reduction of metal oxide films, cleaning of organic contaminants, photoresist ashing, and hydrophilization. It can be applied to the reduction, modification, and cleaning of silver and copper electrodes, as well as the reduction of other metal oxides, surface modification of resins, hydrophilization, and ashing. 【Features】 ■ Achieves safe reduction and cleaning of metal oxide films ■ Addition of oxygen enables faster cleaning speeds ■ Built-in automatic control system for water vapor generation and supply ■ Dedicated design reduces installation area to 60% of conventional models ■ Supports multi-stage processing (up to 3 stages) *For more details, please refer to the PDF document or feel free to contact us.

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